JPH0729445Y2 - 透明物体厚さ測定装置 - Google Patents
透明物体厚さ測定装置Info
- Publication number
- JPH0729445Y2 JPH0729445Y2 JP2036990U JP2036990U JPH0729445Y2 JP H0729445 Y2 JPH0729445 Y2 JP H0729445Y2 JP 2036990 U JP2036990 U JP 2036990U JP 2036990 U JP2036990 U JP 2036990U JP H0729445 Y2 JPH0729445 Y2 JP H0729445Y2
- Authority
- JP
- Japan
- Prior art keywords
- light
- transparent object
- half mirror
- detection head
- measurement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005259 measurement Methods 0.000 claims description 26
- 238000001514 detection method Methods 0.000 claims description 16
- 230000003287 optical effect Effects 0.000 claims description 6
- 239000000463 material Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000002835 absorbance Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2036990U JPH0729445Y2 (ja) | 1990-02-28 | 1990-02-28 | 透明物体厚さ測定装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2036990U JPH0729445Y2 (ja) | 1990-02-28 | 1990-02-28 | 透明物体厚さ測定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH03110304U JPH03110304U (en]) | 1991-11-12 |
JPH0729445Y2 true JPH0729445Y2 (ja) | 1995-07-05 |
Family
ID=31523459
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2036990U Expired - Lifetime JPH0729445Y2 (ja) | 1990-02-28 | 1990-02-28 | 透明物体厚さ測定装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0729445Y2 (en]) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5347787B2 (ja) * | 2009-07-13 | 2013-11-20 | 株式会社ニコン | 軸外しホログラフィック顕微鏡 |
-
1990
- 1990-02-28 JP JP2036990U patent/JPH0729445Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH03110304U (en]) | 1991-11-12 |
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